Flow rate
Nm3/min

Grade 1
0.01µm, 0.01ppm

Grade 3
0.01µm, 0.01ppm

Grade 5
0.01µm, 0.01ppm

Grade 7
 3µm, 1ppm

Grade 9
5µm, 5ppm

 0.57

 E1-12 

 E3-12

 E5-12

 E7-12

 E9-12

 1

 E1-16

 E3-16

 E5-16

 E7-16

 E9-16

 2

 E1-20

 E3-20

 E5-20

 E7-20

 E9-20

 3

 E1-24

 E3-24

 E5-24

 E7-24

 E9-24

 4.9

 E1-28

 E3-28

 E5-28

 E7-28

 E9-28

 7.2

 E1-32

 E3-32

 E5-32

 E7-32

 E9-32

 11

 E1-36

 E3-36

 E5-36

 E7-36

 E9-36

 14

 E1-40

 E3-40

 E5-40

 E7-40

 E9-40

 18

 E1-44

 E3-44

 E5-44

 E7-44

 E9-44

 22

 E1-48

 E3-48

 E5-48

 E7-48

 E9-48

Flow rate
Nm3/min

Grade  Q
5μm, 5ppm

Grade P
1μm, 1ppm

Grade S
0.01μm, 0.01ppm

Grade C
0.01μm,0.003ppm

 0.4

 004Q

 004P

 004S

 004C

 0.7

 007Q

 007P

 007S

 007C

 1.5

 015Q

 015P

 015S

 015C

 2.4

 024Q

 024P

 024S

 024C

 3.5

 035Q

 035P

 035S

 035C

 6

 060Q

 060P

 060S

 060C

 9

 090Q

 090P

 090S

 090C

 12

 120Q

 120P

 120S

 120C

 15

 150Q

 150P

 150S

 150C

 24

 240Q

 240P

 240S

 240C

 28

 280Q

 280P

 280S

 280C

Filter P/N

Element
P/N

 Flow rate
Nm3/min

Grade FF
1μm, 0.05ppm

Grade  MF
0.01μm, 0.1ppm

Grade SMF
0.01μm, 0.01ppm

Grade  AK
0.005μm, 0.005ppm

 AG  0002

  02/05

 0.67

 02/05FF

 02/05MF

 02/05SMF

 02/05AK

 AG  0004

 03/05

 1

 03/05FF

 03/05MF

 03/05SMF

 03/05AK

 AG  0006

 03/10

 1.5

 03/10FF

  03/10MF

  03/10SMF

 03/10AK

 AG  0009

 04/10

 2

 04/10FF

 04/10MF

 04/10SMF

 04/10AK

 AG  0012

 04/20

 3

 04/20FF

 04/20MF

 04/20SMF

 04/20AK

 AG  0018

 05/20

 4.5

 05/20FF

 05/20MF

 05/20SMF

 05/20AK

 AG  0027

 05/25

  6

 05/25FF

 05/25MF

 05/25SMF

 05/25AK

 AG  0036

 07/25

 8

 07/25FF

 07/25MF

07/25SMF

 07/25AK

 AG  0048

 07/30

 12

 07/30FF

 07/30MF

 07/30SMF

 07/30AK

 AG  0072

 10/30

 18

 10/30FF

 10/30MF

 10/30SMF

 10/30AK

 AG  0108

 15/30

 24

 15/30FF

 15/30MF

 15/30SMF

 15/30AK

 AC  0144

 20/30

 32

 20/30FF

 20/30MF

 20/30SMF

 20/30AK

 AC  0192

 30/30

 48

 30/30FF

 30/30MF

 30/30SMF

 30/30AK

 AC  0288

 30/50

 72

 30/50FF

 30/50MF

 30/50SMF

 30/50AK

Flow rate
Nm3/min

Grade PF
25μm

Grade AO
1μm,1ppm

  Grade AA
0.01μm,0.01ppm

Grade AX
0.01μm,0.001ppm

Grade ACS
0.01μm,0.001ppm

 0.53

 K009PF

 K009AO

 K009AA

 K009AX

 K009ACS

 1

 K017PF

 K017AO

 K017AA

 K017AX

 K017ACS

 1.8

 K030PF

 K030AO

 K030AA

 K030AX

 K030ACS

 3.6

 K058PF

 K058AO

 K058AA

 K058AX

 K058ACS

 8.7

 K145PF

 K145AO

 K145AA

 K145AX

 K145ACS

 13.2

 K220PF

 K220AO

 K220AA

 K220AX

 K220ACS

 19.8

 K330PF

 K330AO

 K330AA

 K330AX

 K330ACS

 25.8

 K430PF

 K430AO

 K430AA

 K430AX

 K430ACS

 37

 K620PF

 K620AO

 K620AA

 K620AX

 K620ACS

Line Filter
P/N

Flow rate
Nm3/min  

Grade DP
1μm

Grade GP
1μm, 0.5ppm

Grade HE
0.01μm, 0.01ppm

Grade AC
0.003ppm

 123

 3.45

 88343181

 88343124

 88343157

 88343215

 216

 6.05

 88343199

 88343132

 88343165

 88343223

 275

 7.7

 88343207

 88343140

 88343173

 88343223

 350

 9.8

 88344254

 88344239

 88344247

 88344262

 481

 13.46

 88343330

 88343272

 88343306

 88343363

 563

 15.76

 88343348

 88343280

 88343314

 88343371

 706

 19.76

 88343355

 88343298

 88343322

 88343389

 850

 23.8

 88343488

 88343421

 88343454

 88343512

 1100

 30.8

 88343496

 88343439

 88343462

 88343520

 1380

 38.63

 88343504

 88343447

 88343470

 88343538

Flow rate
Nm3/min

Grade DD/DDP
1μm,0.1ppm

Grade PD
0.01μm,0.01ppm

Grade QD
0.01μm,0.003ppm

 0.5

 DD/DDP9

 PD9

 QD9

 1

 DD/DDP17

 PD17

 QD17

 2

 DD/DDP32

 PD32

 QD32

 2.6

 DD/DDP44

 PD44

 QD44

 3.6

 DD/DDP60

 PD60

 QD60

 7.2

 DD/DDP120

 PD120

 QD120

 9

 DD/DDP150

 PD150

 QD150

 10.5

 DD/DDP175

 PD175

 QD175

 15.6

 DD/DDP280

 PD280

 QD280

 23.4

 DD/DDP390

 PD390

 QD390

 31.2

 DD/DDP520

 PD520

 QD520

 46.8

 DD/DDP780

 PD780

 QD780